| Diameter | 1“ | 2” | 3” | 4“ | 6” |
Growth method | Zonal eigen, neutron irradiation, gas phase doping | ||||
| Purity | 11N | ||||
| Diameter（mm） | 25.4±0.1 | 50.8±0.2 | 76.2±0.2 | 100±0.2 | 150±0.2 |
| Thickness（um） | 500±15 | 280±25 | 380±25 | 525±25 | 675±25 |
| Polishing | SSP,DSP | SSP,DSP | SSP,DSP | SSP,DSP | SSP,DSP |
| Roughness | Ra<5A | Ra<5A | Ra<5A | Ra<5A | Ra<5A |
| Type | P/B, N/Ph, | ||||
Crystal orientation | <100><111>±0.5 | ||||
Electrical resistivity | 1-300 ohm-cm(P,N); 150-200ohm-cm(N); 1000-20000 ohm-cm(P,N) | ||||
| Principal reference edge | NO | 16.0±2.0 | 22.5±2.5 | 32.5±2.5 | 57.5±2.5 |
Secondary reference edge | NO | 8.0±2.0 | 11.5±1.5 | 18.0±2.0 | 37.5±2.5 |
| TTV | <5um | <8um | <10um | <10um | <10um |
| Bow/Warp | <5um | <5um | <15um | <20um | <20um |
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