| Diameter | 1“ | 2” | 3“ | 4“ | 5” | 6“ | 8” | 12“ |
| Growth method | CZ | |||||||
| Purity | 11N | |||||||
| Diameter（mm） | 25.4±0.1 | 50.8±0.2 | 76.2±0.2 | 100±0.2 | 125±0.2 | 150±0.2 | 200±0.2 | 300±0.2 |
| Thickness（um） | 500±15 | 280±25 | 380±25 | 525±25 | 625±25 | 675±25 | 725±25 | 775±25 |
| Polishing | Single toss/Double toss | Single toss/Double toss | Single toss/Double toss | Single toss/Double toss | Single toss/Double toss | Single toss/Double toss | Single toss | Double toss |
| Roughness | Ra<5A | Ra<5A | Ra<5A | Ra<5A | Ra<5A | Ra<5A | Ra<5A | Ra<5A |
| Type | P/B, N/Ph, N/As, N/Sb | P/B | ||||||
Crystal orientation | <100><111><110>±0.5 | <100><111>±0.5 | <100>±0.5 | |||||
Electrical resistivity | 0.01-100ohm-cm（P/B, N/Ph）；0.01-0.05ohm-cm（N/Sb）;0.001-0.005ohm-cm（N/As） | 1-100ohm-cm | ||||||
Principal reference edge | NO | 16.0±2.0 | 22.5±2.5 | 32.5±2.5 | 42.5±2.5 | 57.5±2.5 | Notch | Notch |
Secondary reference edge | NO | 8.0±2.0 | 11.5±1.5 | 18.0±2.0 | 27.5±2.5 | 37.5±2.5 | NO | NO |
| TTV | <5um | <8um | <10um | <10um | <10um | <10um | <10um | <15um |
| Bow/Warp | <5um | <5um | <15um | <20um | <20um | <20um | <20um | <20um |
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